The Field Emission Scanning Electron Microscope with focused ion beam (FIB). Counts with the EDX microanalysis, cryo option for the observation of frozen samples and variable pressure.

• User manual

The Field Emission Scanning Electron Microscope with focused ion beam SCIOS 2.

Electron column

• Electron beam resolution
  • 0.7 nm to 30 kV STEM
  • 1.4 nm to 1 kV
  • 1.2 nm to 1 kV with deceleration
•  Beam current from 1 pA to 400 nA
• Accelerate voltage from 200 V to 30 kV

Ga Ions Column

• Accelerate voltage from 500 V to 30 kV
• Beam current from 1.5 pA to 65 nA
• Resolution 3 nm
• GIS available Pt, W y C

EDX Microanalysis

• Oxford Ultim Max 170 Detector, with 170 mm2 detectors allows to collect quantitative analysis at more than 400,000 cps.
• AzTec INCA software, for data analysis that include TrueMap option. This post-processing removes overlaps between different elements and the background signal from the compositional map.

Cryo system QUORUM PP3010

This accessory has a terminal for an instant freezing of the sample using the Slush technique and its subsequent transfer to the inside of the microscope keeping the sample at low temperature at all times.